Very low-temperature growth of silicon thin films using chlorinated precursors and optical properties
| Autor: | Linares, Javitt, López-Suárez, A., Ramos, C., Picquart, M., García-Sánchez, M.F., Dutt, A., Santana, G. |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 March 2020 108 |
| Databáze: | ScienceDirect |
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