Effects of nitrogen doping on vacancy-oxygen complexes in neutron irradiated Czochralski silicon
| Autor: | Qin, Yazhou, Wang, Peng, Jin, Shangjie, Cui, Can, Yang, Deren, Yu, Xuegong |
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| Zdroj: | In Materials Science in Semiconductor Processing 1 August 2019 98:65-69 |
| Databáze: | ScienceDirect |
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