Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy
| Autor: | Szyszka, Adam, Wośko, Mateusz, Paszkiewicz, Bogdan, Paszkiewicz, Regina |
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| Zdroj: | In Materials Science in Semiconductor Processing May 2019 94:57-63 |
| Databáze: | ScienceDirect |
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