Direct etching of perovskite film by electron-beam scanning
| Autor: | Khachatryan, Hayk, Kim, Yong-Hwan, Kim, Kyoung-Bo, Yang, Hyun-Ju, Kim, Moojin |
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| Zdroj: | In Materials Science in Semiconductor Processing February 2019 90:171-181 |
| Databáze: | ScienceDirect |
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