Electrical isolation of GaAs and AlGaAs/GaAs Quantum Cascade Lasers by deep hydrogen implantation
| Autor: | Kozubal, Maciej Artur, Szerling, Anna, Kosiel, Kamil, Myśliwiec, Marcin, Pągowska, Karolina, Jakieła, Rafał, Kruszka, Renata, Guziewicz, Marek, Barcz, Adam |
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| Zdroj: | In Materials Science in Semiconductor Processing February 2018 74:88-97 |
| Databáze: | ScienceDirect |
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