Lifetime improvement in silicon wafers using weak magnetic fields
Autor: | Kuryliuk, A., Steblenko, L., Nadtochiy, A., Korotchenkov, O. |
---|---|
Zdroj: | In Materials Science in Semiconductor Processing 1 August 2017 66:99-104 |
Databáze: | ScienceDirect |
Externí odkaz: |