Autor:	Margetis, Joe, Mosleh, Aboozar, Ghetmiri, Seyed Amir, Al-Kabi, Sattar, Dou, Wei, Du, Wei, Bhargava, Nupur, Yu, Shui-Qing, Profijt, Harald, Kohen, David, Loo, Roger, Vohra, Anurag, Tolle, John
Zdroj:	In Materials Science in Semiconductor Processing 1 November 2017 70:38-43
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect