Study of fin tapering effect in nanoscale symmetric dual-k spacer (SDS) hybrid FinFETs
| Autor: | Pradhan, K.P., Priyanka, Sahu, P.K. |
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| Zdroj: | In Materials Science in Semiconductor Processing January 2017 57:185-189 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Pradhan, K.P., Priyanka, Sahu, P.K. |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing January 2017 57:185-189 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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