Dopant transfer from poly-si thin films to c-Si: An alternative technique for device processing
| Autor: | Ricardo, L., Amaral, A., Nunes de Carvalho, C., Lavareda, G. |
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| Zdroj: | In Materials Science in Semiconductor Processing February 2016 42 Part 2:210-214 |
| Databáze: | ScienceDirect |
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