Strain/composition interplay in thin SiGe layers on insulator processed by Ge condensation
| Autor: | Boureau, Victor, Benoit, Daniel, Warot, Bénédicte, Hÿtch, Martin, Claverie, Alain |
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| Zdroj: | In Materials Science in Semiconductor Processing February 2016 42 Part 2:251-254 |
| Databáze: | ScienceDirect |
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