Liquid-target reactive magnetron sputter epitaxy of High quality GaN(0001̄) nanorods on Si(111)
| Autor: | Junaid, M., Chen, Y.-T., Palisaitis, J., Garbrecht, M., Hsiao, C.-L., Persson, P.O.Å., Hultman, L., Birch, J. |
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| Zdroj: | In Materials Science in Semiconductor Processing November 2015 39:702-710 |
| Databáze: | ScienceDirect |
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