Structural and light emitting properties of silicon-rich silicon nitride films grown by plasma enhanced-chemical vapor deposition
| Autor: | Torchynska, T.V., Casas Espinola, J.L., Khomenkova, L., Vergara Hernandez, E., Andraca Adame, J.A., Slaoui, A. |
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| Zdroj: | In Materials Science in Semiconductor Processing September 2015 37:46-50 |
| Databáze: | ScienceDirect |
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