Discharge cutting technology for specific crystallographic planes of monocrystalline silicon
| Autor: | Tian, Ye, Qiu, Mingbo, Liu, Zhidong, Tian, Zongjun, Huang, Yinhui |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing November 2014 27:546-552 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect