Integration of SiC-1D nanostructures into nano-field effect transistors

Autor: Ollivier, M., Latu-Romain, L., Salem, B., Fradetal, L., Brouzet, V., Choi, J.-H., Bano, E.
Zdroj: In Materials Science in Semiconductor Processing January 2015 29:218-222
Databáze: ScienceDirect