Electrospray deposition and characterization of cobalt oxide thin films

Autor: Kilo, O., Jabbour, J., Habchi, R., Abboud, N., Brouche, M., Khoury, A., Zaouk, D.
Zdroj: In Materials Science in Semiconductor Processing August 2014 24:57-61
Databáze: ScienceDirect