Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
| Autor: | Paskaleva, A., Weinreich, W., Bauer, A.J., Lemberger, M., Frey, L. |
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| Zdroj: | In Materials Science in Semiconductor Processing January 2015 29:124-131 |
| Databáze: | ScienceDirect |
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