Effects of oxygen concentration on the properties of Al-doped ZnO transparent conductive films deposited by pulsed DC magnetron sputtering

Autor: Kim, Doo-Soo, Park, Ji-Hyeon, Lee, Su-Jeong, Ahn, Kyung-Jun, Lee, Mi-So, Ham, Moon-Ho, Lee, Woong, Myoung, Jae-Min
Zdroj: In Materials Science in Semiconductor Processing June 2013 16(3):997-1001
Databáze: ScienceDirect