Elimination of impurities from the surface of silicon using hydrochloric and nitric acid
| Autor: | Visnovec, Karl, Variawa, Chirag, Utigard, Torstein, Mitrašinović, Aleksandar |
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| Zdroj: | In Materials Science in Semiconductor Processing February 2013 16(1):106-110 |
| Databáze: | ScienceDirect |
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