Effects of thermal annealing on the morphology of the Al xGa (1−x)N films
| Autor: | Çörekçi, S., Tekeli, Z., Çakmak, M., Özçelik, S., Dinç, Y., Zeybek, O., Özbay, E. |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2009 12(6):238-242 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect