TEM characterization of Si nanowires grown by CVD on Si pre-structured by nanosphere lithography
| Autor: | Lindner, Jörg K.N., Bahloul-Hourlier, Djamila, Kraus, Daniel, Weinl, Michael, Mélin, Thierry, Stritzker, Bernd |
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| Zdroj: | In Materials Science in Semiconductor Processing 2008 11(5):169-174 |
| Databáze: | ScienceDirect |
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