Impact of defects on the high- κ/MG stack: The electrical characterization challenge
| Autor: | Pantisano, Luigi, Ragnarsson, L.-Å., Houssa, M., Degraeve, R., Groeseneken, G., Schram, T., Degendt, S., Heyns, M., Afanas’ev, V., Stesmans, A. |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2006 9(6):880-884 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect