Optical and crystallographic analysis of thin films of GeC deposited using a unique hollow cathode sputtering technique
| Autor: | Huguenin-Love, J.L., Soukup, R.J., Ianno, N.J., Schrader, J.S., Thompson, D.W., Dalal, V.L. |
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| Zdroj: | In Materials Science in Semiconductor Processing 2006 9(4):759-763 |
| Databáze: | ScienceDirect |
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