Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI
Autor: | Ma, Tongda, Tu, Hailing, Shao, Beiling, Liu, Ansheng, Hu, Guangyong |
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Zdroj: | In Materials Science in Semiconductor Processing 2006 9(1):49-52 |
Databáze: | ScienceDirect |
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