Simultaneous optical measurement of Ge content and Boron doping in strained epitaxial films using a novel data-analysis technique
| Autor: | Morris, Stephen *, Fougeres, Paul, Bozzo-Escoubas, Stéphanie, Bodnar, Sylvie, Gaillard, Stephane |
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| Zdroj: | In Materials Science in Semiconductor Processing 2005 8(1):261-266 |
| Databáze: | ScienceDirect |
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