Seed layer corrosion of Damascene structures in copper sulfate electrolytes
| Autor: | Martyak, Nicholas M. *, Ricou, Pierre |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2003 6(4):225-233 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Martyak, Nicholas M. *, Ricou, Pierre |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2003 6(4):225-233 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect