Silicon melt convection in large size Czochralski crucibles
| Autor: | Virbulis, J. *, Wetzel, Th., Tomzig, E., von Ammon, W. |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(4):353-359 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Virbulis, J. *, Wetzel, Th., Tomzig, E., von Ammon, W. |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(4):353-359 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect