Analysis of localized vibration of nitrogen complexes in CZ silicon
| Autor: | Okubo, I *, Harada, H, Mikayama, T, Funao, D, Inoue, N |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(4):397-401 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Okubo, I *, Harada, H, Mikayama, T, Funao, D, Inoue, N |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(4):397-401 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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