Plasma roughening of polished SiC substrates
| Autor: | Franz, Gerhard |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(6):525-527 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Franz, Gerhard |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(6):525-527 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect