Plasma roughening of polished SiC substrates
Autor: | Franz, Gerhard |
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Zdroj: | In Materials Science in Semiconductor Processing 2002 5(6):525-527 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Franz, Gerhard |
---|---|
Zdroj: | In Materials Science in Semiconductor Processing 2002 5(6):525-527 |
Databáze: | ScienceDirect |
Externí odkaz: |