Residual free reactive ion etching of the Bell contact Ti/Pt/Au
| Autor: | Franz, Gerhard *, Kachel, Robert, Sotier, Stefan |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(1):45-50 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Franz, Gerhard *, Kachel, Robert, Sotier, Stefan |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2002 5(1):45-50 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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