Oxidation of ion implanted silicon carbide
| Autor: | Makhtari, A *, Raineri, V, La Via, F, Franzò, G, Frisina, F, Calcagno, L |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2001 4(4):345-349 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Makhtari, A *, Raineri, V, La Via, F, Franzò, G, Frisina, F, Calcagno, L |
|---|---|
| Zdroj: | In Materials Science in Semiconductor Processing 2001 4(4):345-349 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect