InAlGaAs bulk micromachined tunable Fabry–Pérot filter for dense WDM systems
| Autor: | Pfeiffer, J *, Peerlings, J, Riemenschneider, R, Genovese, R, Aziz, M, Goutain, E, Künzel, H, Görtz, W, Böhm, G, Amann, M.C, Meißner, P, Hartnagel, H.L |
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| Zdroj: | In Materials Science in Semiconductor Processing 2000 3(5):409-412 |
| Databáze: | ScienceDirect |
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