Room temperature bonding of GaN and diamond substrates via atomic layer
| Autor: | Matsumae, Takashi, Kurashima, Yuichi, Takagi, Hideki, Shirayanagi, Yusuke, Hiza, Shuichi, Nishimura, Kunihiko, Higurashi, Eiji |
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| Zdroj: | In Scripta Materialia 1 July 2022 215 |
| Databáze: | ScienceDirect |
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