Room temperature bonding of GaN and diamond substrates via atomic layer

Autor: Matsumae, Takashi, Kurashima, Yuichi, Takagi, Hideki, Shirayanagi, Yusuke, Hiza, Shuichi, Nishimura, Kunihiko, Higurashi, Eiji
Zdroj: In Scripta Materialia 1 July 2022 215
Databáze: ScienceDirect