Influence of carbon deficiency on phase formation and thermal stability of super-hard TaCy thin films

Autor: Riedl, H., Glechner, T., Wojcik, T., Koutná, N., Kolozsvári, S., Paneta, V., Holec, D., Primetzhofer, D., Mayrhofer, P.H.
Zdroj: In Scripta Materialia May 2018 149:150-154
Databáze: ScienceDirect