Matching in-situ and ex-situ recorded stress gradients in an AlxGa1 − xN Heterostructure: Complementary wafer curvature analyses in time and space
| Autor: | Reisinger, M., Ostermaier, C., Tomberger, M., Zechner, J., Sartory, B., Ecker, W., Daumiller, I., Keckes, J. |
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| Zdroj: | In Scripta Materialia 1 April 2018 147:50-54 |
| Databáze: | ScienceDirect |
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