Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives
| Autor: | Barnes, J.P., Grenier, A., Mouton, I., Barraud, S., Audoit, G., Bogdanowicz, J., Fleischmann, C., Melkonyan, D., Vandervorst, W., Duguay, S., Rolland, N., Vurpillot, F., Blavette, D. |
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| Zdroj: | In Scripta Materialia 15 April 2018 148:91-97 |
| Databáze: | ScienceDirect |
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