Highly selective diamond and β-SiC crystal formation at increased atomic hydrogen concentration: A route for synthesis of high-quality and patterned hybrid diamond/β-SiC composite film

Autor: Zhuang, Hao, Zhang, Lei, Staedler, Thorsten, Jiang, Xin
Zdroj: In Scripta Materialia 2011 65(6):548-551
Databáze: ScienceDirect