Unravelling the ion-energy-dependent structure evolution and its implications for the elastic properties of (V,Al)N thin films
| Autor: | Karimi Aghda, Soheil, Music, Denis, Unutulmazsoy, Yeliz, Sua, Heng Han, Mráz, Stanislav, Hans, Marcus, Primetzhofer, Daniel, Anders, André, Schneider, Jochen M. |
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| Zdroj: | In Acta Materialia 1 August 2021 214 |
| Databáze: | ScienceDirect |
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