The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen
| Autor: | Daghbouj, N., Li, B.S., Callisti, M., Sen, H.S., Lin, J., Ou, X., Karlik, M., Polcar, T. |
|---|---|
| Zdroj: | In Acta Materialia 15 April 2020 188:609-622 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect