Deposition of alumina thin film by dual magnetron sputtering: Is it γ-Al2O3?
| Autor: | Engelhart, W., Dreher, W., Eibl, O., Schier, V. |
|---|---|
| Zdroj: | In Acta Materialia December 2011 59(20):7757-7767 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Engelhart, W., Dreher, W., Eibl, O., Schier, V. |
|---|---|
| Zdroj: | In Acta Materialia December 2011 59(20):7757-7767 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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