Epitaxial Ti2AlN(0 0 0 1) thin film deposition by dual-target reactive magnetron sputtering
Autor: | Persson, P.O.Å., Kodambaka, S., Petrov, I., Hultman, L. |
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Zdroj: | In Acta Materialia August 2007 55(13):4401-4407 |
Databáze: | ScienceDirect |
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