Epitaxial Ti2AlN(0 0 0 1) thin film deposition by dual-target reactive magnetron sputtering

Autor: Persson, P.O.Å., Kodambaka, S., Petrov, I., Hultman, L.
Zdroj: In Acta Materialia August 2007 55(13):4401-4407
Databáze: ScienceDirect