Thermal analysis of surface micromachined porous silicon membranes using the 3ω method: Implications for thermal sensing
| Autor: | Erfantalab, Sobhan, Sharma, Pritam, Parish, Giacinta, Keating, Adrian |
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| Zdroj: | In Applied Thermal Engineering 5 March 2023 222 |
| Databáze: | ScienceDirect |
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