Monte Carlo simulations of gas flow and heat transfer in vacuum packaged MEMS devices
| Autor: | Liu, Hongwei, Wang, Moran, Wang, Jinku, Zhang, Guoyan, Liao, Huailin, Huang, Ru, Zhang, Xing |
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| Zdroj: | In Applied Thermal Engineering 2007 27(2):323-329 |
| Databáze: | ScienceDirect |
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