Transferability of weakest link model parameters of polysilicon from indentation fracture to failure of MEMS structures
| Autor: | Satheesh, S.M., Banerjee, Anuradha, Bhattacharya, Enakshi |
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| Zdroj: | In Engineering Failure Analysis September 2021 127 |
| Databáze: | ScienceDirect |
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