A novel arc-cantilevers F-P filter with low stress applicated in infrared spectral integrated photodetector chip

Autor: Tian, Huilian, Ying, Xiangxiao, Zhou, Jian, Huang, Min, Wang, Fangfang, Zhou, Ziji, Hao, JiaMing, Zhou, Yi, Chen, Jianxin
Zdroj: In Infrared Physics and Technology August 2023 132
Databáze: ScienceDirect