Effective suppression of surface leakage currents in T2SL photodetectors with deep and vertical mesa sidewalls via TMA and H2 plasma combined pretreatment
| Autor: | Tan, Bo, Cheng, Sufen, Liu, Bin, Zhou, Wenhong, Liu, Yongfeng, Zhang, Chuanjie, Cao, Shensong, Ding, Yanyan, Yang, Zhaochen, Huang, Li |
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| Zdroj: | In Infrared Physics and Technology August 2021 116 |
| Databáze: | ScienceDirect |
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