A review on plasma-etch-process induced damage of HgCdTe
Autor: | Liu, Lingfeng, Chen, Yiyu, Ye, Zhenhua, Ding, Ruijun |
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Zdroj: | In Infrared Physics and Technology May 2018 90:175-185 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Liu, Lingfeng, Chen, Yiyu, Ye, Zhenhua, Ding, Ruijun |
---|---|
Zdroj: | In Infrared Physics and Technology May 2018 90:175-185 |
Databáze: | ScienceDirect |
Externí odkaz: |