Patterning of oxide-hardened gold black by photolithography and metal lift-off
Autor: | Panjwani, Deep, Yesiltas, Mehmet, Nath, Janardan, Maukonen, D.E., Rezadad, Imen, Smith, Evan M., Peale, R.E., Hirschmugl, Carol, Sedlmair, Julia, Wehlitz, Ralf, Unger, Miriam, Boreman, Glenn |
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Zdroj: | In Infrared Physics and Technology January 2014 62:94-99 |
Databáze: | ScienceDirect |
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