Patterning of oxide-hardened gold black by photolithography and metal lift-off

Autor: Panjwani, Deep, Yesiltas, Mehmet, Nath, Janardan, Maukonen, D.E., Rezadad, Imen, Smith, Evan M., Peale, R.E., Hirschmugl, Carol, Sedlmair, Julia, Wehlitz, Ralf, Unger, Miriam, Boreman, Glenn
Zdroj: In Infrared Physics and Technology January 2014 62:94-99
Databáze: ScienceDirect